In general, every single plasma system installed by iplas is custom-tailored high-tech equipment. This implies that there is no order list from which an iplas system can choosen. The parts necessary for a plasma system depend on the specific application and the respective production environment. Whenever it is possible and economical, standardised components are used to build up a system. If this is not the case, iplas is able to redesign every single module of a plasma system according to the customer´s specifications.
Three different stages of expansion are possible when a plasma system is configured:
(1) Manual system for research & development
All process parameters are operated and controlled by separate units and manually adjusted.
Manual CYRANNUS® plasma system
(2) Semi-automatic system for development or smaller production
All process parameters are controlled by PLC. The material handling is done manually.
Semi-automatic CYRANNUS® plasma system
(3) Fully automatic system for production with PLC control
Individually designed process and integration into an external process flow is possible. Full automation reduces labor costs through enhanced process control without manual handling.
Fully automatic CYRANNUS® plasma system
diamond deposition system as an example
As mentioned above, there is not the CYRANNUS® plasma system. The following table contains the components and features of a diamond deposition system available from iplas as an example.
plasma source
- CYRANNUS® I at 6" or 10.5"
- larger size on request
- diameter of plasma chamber 6" or 10.5"
microwave
- 2,45 GHz / 6kW continuous wave
- switch mode power supply
tuner
- automated EH tuning element controlled by PLC
- different working modes for easy operation
substrate holder
- heated or cooled substrate holder (optional)
- prepared for bias (optional)
- automated substrate positioning (optional)
vacuum
- chamber directly connected to plasma source
- load lock door for substrate feeding
- double step rotary vane pump with N2 bypass
- pressure control
process gas
- individual gas flow controller
- gas shower inside plasma source
automation
- control system built of modular devices
- PLC Simatic* S7
- field bus Profibus*
- process parameters displayed
- input or change of process parameters on screen
- different recipes can be stored in the PLC
- process documentation module (optional)
safety
- multiple secured safety circuits
- interlocks by hardware and PLC
- CE conformity
* trademark by Siemens AG
The iplas plasma systems are based on an innovative control concept which includes state of the art plasma technology and automation technology. A powerful PLC communicates with modular control units via field bus. This allows simple remote control, maintenance or even system modifications or upgrades.
Flexibility and reliability of plasma technology is achieved through a modular design. Tailored systems consist of standardised modules. This has the following advantages:
The main idea of the COSMOS system ("COntrol System with MOdular SIaves") is its modular design. All relevant control tasks of a CYRANNUS® plasma system are controlled by the COSMOS components. All modules are connected via Profibus.
The following table contains the key information on the single COSMOS control modules.
The generator controller controlls the function of the microwave generator.
detected parameters:
- generator power
- reflected power
- generator ready
- generator error status
displayed parameters:
- generator power
- reflected power
- generator ready
- generator error status
controll-/adjustable parameters:
- generator (on/off)
- generator power
The pressure controller controlls the pressure in the process chamber.
detected parameters:
- pressure
- throttle valve position
displayed parameters:
- pressure
- throttle valve position
controll-/adjustable parameters:
- pressure
- throttle valve position
The safety controller controlls all safety relevant parameters of the plasma source.
detected parameters:
- state of water and air cooling
- state of generator
- air temperatur
- flange temperature 1 / 2
- motor protective switch blower
- state of plasma (on/off)
displayed parameters:
- state of water and air cooling (on/off)
- state of generator (on/off)
- air temperatur limit exceeded
- flange temperature 1 / 2 limit exceeded
- state of plasma (on/off)
controll-/adjustable parameters:
- water and air cooling (on/off)
- generator (on/off)
- unlock
The tuner controller controlls the function of the EH-Tuner.
detected parameters:
- position E-tuner
- position H-tuner
- reflected power
displayed parameters:
- motor E-Tuner active
- motor H-Tuner active
- saving operation
controll-/adjustable parameters:
- minimize reflected power
- save ignition position
- restore ignition position
- safe controll position
- restore controll position
The vacuum controller controlls the vacuum system.
detected parameters:
- state of main valve (open/closed)
- state of venting valve (open/closed)
- state of vacuum pump (on/off)
- motor protective switch of vacuum pump
displayed parameters:
- state of main valve (open/closed)
- state of venting valve (open/closed)
- state of vacuum pump (on/off)
controll-/adjustable parameters
- state of main valve (open/closed)
- state of venting valve (open/closed)
- state of vacuum pump (on/off)